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WAFER CHUCK PEDESTAL ASSEMBLIES
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Aluminum Heat or Aluminum Heat or Heat/Cool Pedestal AssembliesHeat/Cool Pedestal Assemblies

Tubular or cable heaters are precisely formed and cast into aluminum using CAS's proprietary low pressure casting process. Heater assemblies are precision machined to customer specifications such as wafer lift pin holes, vacuum connection features and vacuum groove patterns. Similar and dissimilar metals can be e-beam welded to form a shaft, providing an exit for electrical lead wires.

Specifications

  • Performance to 450°C (842°F)
  • Materials depending on the metallurgical, thermal and mechanical properties required
    • Pure (99.7 percent) aluminum – Alloy 170.1
    • Aluminum Alloy 356
    • Aluminum Alloy 319
  • Perpendicularity to better than .1 mm
  • Flatness to 0.005 mm on 300 mm wafer chuck
  • Optional cooling tube

Sandwiched Pedestal AssembliesSandwiched Pedestal Assemblies

A sandwich pedestal assembly is a combination of a mica foil, Kapton®, silicon rubber or other heater combinations that are trapped between two or more machined metal plates or ceramic plates. The assembly may include combinations of sensors, controllers, cabling and other electrical or mechanical components. This construction is excellent for unique geometry heater assemblies, and certain high temperature and process material application.

 

Engineering SupportEngineering Support

CAS uses in-house engineering capabilities to optimize the design and performance of pedestal heater assemblies. These include the use of finite element analysis (FEA) software to evaluate the thermal and mechanical characteristics for a part in typical wafer processing boundary conditions. Fore more complex analysis, the services of Single Iteration, CAS's engineering services division, offer additional technical skills and resources at the expert level.

Kapton® is a registered trademark of E.I. du Pont de Nemours & Company.

 

 
 
 

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